High‑Purity Transfer, Filtration, and Packaging Station
Functional Filtration
How does the SUB:01 remove suspended particles down to 0.05 microns?
1. Load and connect your source chemical
You place a 5 L quartz source container on the lower deck and connect it to the fluoropolymer (PFA/PTFE) pipeline using quick, clean fittings. A chemically inert diaphragm pump then pulls product from this source into the internal flow path, so no metals or elastomers touch your liquid.
2. Purge and stabilize the flow path
Before product moves, the system uses high‑purity helium and vacuum to purge lines and containers. Pipelines and the receiving quartz bottle are swept with inert gas, then vacuum‑degassed, pushing out air, moisture, and dissolved gases so the chemical sees a clean, controlled environment from the first drop.
3. Filter down to sub‑micron levels
As the pump transfers liquid, it passes through a cascade of two in‑line filters: first 0.1 µm, then 0.05 µm. This two‑stage barrier strips out suspended particles down to sub‑0.1 µm, while pressure and flow sensors monitor conditions so you can see exactly how the filtration is performing in real time.
4. Fill, sample, and rinse in a clean zone
The filtered liquid enters a non-certified clean zone, where it fills the 1.8 L quartz transport container under ULPA‑filtered air. You can divert a portion to a dedicated sample vessel for QA, then finish the cycle by connecting a high‑purity solvent to rinse and decontaminate the internal piping—readying the stand for the next batch or product.
The Power of the SUB:01 Filtration Station
1. Package high‑purity chemicals without adding contamination
This stand transfers your liquid from a 5 L source bottle into a 1.8 L quartz transport container through a fully inert flow path (PFA/PTFE + quartz). Along the way it passes through a two‑stage filter stack (0.1 µm then 0.05 µm), removing fine particles that would otherwise compromise microelectronics, battery, or specialty chemical processes.
2. Create a mini cleanroom around your fill operation
The filling area is an uncertified clean zone with ULPA air filtration and integrated particle counting. That means your fill, sampling, and capping steps happen in a controlled environment, sharply reducing the risk of airborne particles falling into open containers while you work.
3. Purge, degas, and switch products safely
Built‑in helium purge lines, a vacuum system, and a fluoropolymer diaphragm pump let you purge oxygen, vacuum lines and vessels, and move product without exposing it to ambient air. A dedicated high‑purity solvent inlet lets you rinse and decontaminate the internal piping between toxic or incompatible products, so you can confidently switch campaigns.
4. Give operations and QA full control over the process
Pressure sensors, flow monitoring, and a clear process panel make the sequence of valves, flows, and operating states visible at a glance. You can run repeatable fill cycles, capture samples via a dedicated sampling vessel, and document conditions for QA—turning what’s usually a messy manual operation into a controlled, traceable step in your production or R&D workflow.
The World's First >0.1 µm Particle Filtration Station under $200,000
High-Purity Filtration & Packaging Stand
Designed for high-purity chemical transfer, sub-micron particle filtration, inert-gas purging, vacuum degassing, and controlled packaging into quartz transport containers, the OMAEWA SUB:01 stand is built for specialty chemical, advanced materials, and microelectronics-oriented workflows.
The system combines a local clean zone, fluoropolymer flow path materials, quartz containers, cascade filtration, vacuum support, and integrated instrumentation into one controlled filling platform.
What It Does
Transfers product from a 5 L source container into a 1.8 dm³ quartz packaging container in a controlled environment.
Uses inert gas purging and vacuum degassing to prepare lines and containers before fill operations.
Removes suspended particles through a two-stage filtration cascade rated at 0.1 µm and 0.05 µm.
Supports sample collection, rinsing, and decontamination between products with a dedicated solvent connection.
Reduces contamination risk through ISO Class 5 local clean-zone packaging conditions.
System Highlights
Overall
Packaging environment:
A local clean zone with controlled piping, shut-off valves, purge, vacuum, and degassing capability.
Product path
High-purity PFA/PTFE flow path with quartz containers for low-contamination chemical handling.
Filtration
Two-stage cascade filtration using 0.1 µm and 0.05 µm filter layers.
Monitoring
Pressure indication, flow monitoring, particle counting, and analog control interface.
Changeover support
High-purity solvent rinse/decontamination connection for toxic or trace-sensitive products.
Item Details
Maximum power consumption
No more than 1,500 W
Minimum exhaust ventilation
Not less than 500 m³/h
Maximum scale load
3 kg
Filter type
FVM ULPA 15
Source container volume
5 L
Packaging container volume
1.8 dm³
Sampling vessel volume
No more than 0.25 dm³
Control type
Analog
Utility
Requirements
Helium
Grade no worse than m-A (99.995%), pressure from 0.02 to 0.04 MPa
Compressed air
Source capable of at least 6 bar
Electrical
230 V, 50 Hz, protective grounding
Ventilation
Local exhaust plus general supply-exhaust room ventilation
Filtration stages
PTFE/PFA element, 0.1 µm; PTFE/PFA element, 0.05 µm
Filtration system pipeline material
PFA
Shut-off valve control pipeline material
Polyurethane
Helium supply pipeline material
Stainless steel AISI 316L and PFA
Packaging connection types
PFA 1/4 and PFA 3/8
Sampling vessel connection type
PFA 1/4
Utility
Requirements
-
Compact indicator with digital display and universal input
-
Particle counter Liquilaz-S
-
Liquid flow regulator NT 6500
-
Helium final cleaning filter from moisture
Housing material
PFA
Connection
1/4 Flaratek, minimum 5 outlets
Max operating temperature
100 °C
Max operating pressure
3 bar at 100 °C
Gasket material
E-FKM
Liquid flow indicator
High-purity PFA liquid flow meter and flow regulator
Shut-off valves
18 high-purity PFA valves with PTFE stems
Pressure indication
High-purity PFA/PTFE pressure sensor, 0 to 6 bar, 4–20 mA output
Sensor accuracy
No more than 1% of full scale
Overpressure limit
At least 150% of full scale
Max pressure sensor temperature
No more than 65 °C
Pipeline system
Cascade of high-purity PFA pipelines.
High-purity substance container
Quartz 5 L source container with 1/4 connections and PTFE shut-off mechanism; PFA sampling container 250 mL.
Helium supply system
Two-stage regulator, nickel-plated brass body, max inlet 250 bar, max outlet 2 bar, helium leakage no more than 2×10-8 bar × cm³/sec, Cv = 0.2.
Liquid pumping system
Pneumatic diaphragm pump with fluoroplastic body, diaphragms, valves, and seals; maximum feed 10 L/min.
Gas cleaning system
Mechanical cleaning filter less than 0.05 µm and helium final moisture-cleaning filter with 210 g capacity.
Vacuum system
Rotary vane vacuum pump with maximum vacuum not less than 7×10-1 mbar and capacity up to 19.8 m³/h.
Maximum vacuum
Not less than 7×10-1 mbar
Maximum capacity
19.8 m³/h
Noise level
No more than 65 dB
Inlet/outlet nominal diameter
25 / 25 mm
Maximum evacuated vessel volume
3.5 m³
Power supply
220 V, 60 Hz
Maximum dimensions
180 × 286 × 590 mm
Maximum weight
28 kg
Ambient temperature
20 ± 5 °C
Relative humidity
Not more than 80%
Atmospheric pressure
84 to 106 kPa (630 to 800 mm Hg)
Air quality
Harmful substance content must not exceed work-area sanitary limits.
Contact Us
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